Functional Micro Sensor for Force Measurement with Silicon Strain Gauge-Structural Design, Development and Evaluation Experiment of Force Sensor-
نویسندگان
چکیده
منابع مشابه
Three-axis micro-force sensor with sub-micro-Newton measurement uncertainty and tunable force range
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ژورنال
عنوان ژورنال: Journal of the Robotics Society of Japan
سال: 2006
ISSN: 0289-1824,1884-7145
DOI: 10.7210/jrsj.24.754